Klarf坐标转换逻辑

1. DiePitch,它是包含（x,y）的一组坐标值，也可以写作Die Size，基于Wafer Map上的每个小方格的长（X）跟宽（Y），单位一般为微米（um）
2. SampleCenterLocation，它是包含（x,y）的一组坐标值，理解为以物理圆心为（0,0）点，第一颗Die（小方格）左下角交点距离（0,0）点的值，单位为微米
3. Die Index，它是包含（x,y）的一组坐标值，理解为Die（小方格）索引，假设我们在平面建立坐标系，圆心跟坐标（0,0）点重合，我们以DiePitch的X长度在X轴上等距离画刻度，以DiePitch的Y长度在Y轴上画刻度，这时候我们手里有以DiePitch（x,y）为大小的小方格N个，我们沿着（0,0）点放第一个小方格叫（0,0）die，那它的Index为（0,0），沿X轴放第二个小方格，它的索引为(1,0)，沿着Y轴放第三个小方格，它的索引为(0,1)，等我们将小方格放满整个圆里时，便有了：(0,0)(0,1)(0,2)(0,3)(1,0)(1,1)(0,-1)(-1,0)(-1,1)(-1,2)(1,2)(2,3)(3,2)...等这么一组Die Index
4. DefectList，缺陷清单，我们给每一颗缺陷编号，这个编号叫DefectID，再给每颗缺陷确定位置坐标，这个时候我们要考虑，有坐标一定有参考对象，这个坐标的参考对象是谁？那在整个Map绘制中，无非有两个参考对象，Wafer Map（我们画的这个圆）、基于wafer Map里面的Die（圆里每个小方格）。这样的话我们在坐标对应关系中最多应该可以看到两组坐标，一组叫（x,y），一组叫（Xrel,Yrel）,这是我们来界定它的参考对象，第一组(x,y)是基于wafer圆心为参考点的坐标，第二组（Xrel,Yrel）是基于每颗die（小方格左下脚为0,0点）的坐标，第一组可以不存在，因为根据第二组可以计算得到
5. SampleOrientationMarkType,标记物，是指在当前wafer中它的上下左右要以什么为参考值，一般有NOTCH（缺口）、FLAT（平边）
6. OrientationMarkLocation，标记物方向，一般有四个，DOWN、RIGHT、LEFT、UP（0，90，180，270）
7. 厘清上述名词关系后我们开始进行坐标转换（假设通过Xrel,Yrel，需要得到X,Y）COPY 已知Xrel为：1125671，Yrel为：117344； SampleCenterLocation的X为：9636001，Y为：4129002； DiePitch的X为：2782971，Y为：1567961， DieIndex的X为：0，Y为：47 X = (Xrel + X_DieIndex*X_DiePitch) - X_SampleCenterLocation Y = (Yrel + Y_DieIndex*Y_DiePitch) - Y_SampleCenterLocation 这个必须考虑Notch方向

附Klarf样例文件：

FileVersion 1 1;
FileTimestamp 10-21-21 14:37:33;
TiffSpec 6.0 R NA;
TiffFilename klarf with image.t;
InspectionStationID “KLA-TENCOR” “2351” “HYKLA03”;
SampleType WAFER;
ResultTimestamp 10-21-21 14:37:33;
LotID “HJU732”;
SampleSize 1 200;
SetupID “020D_IMD1_SRO” 06-02-20 20:35:28;
StepID “IMD1_SRO”;
DeviceID “020D”;
SampleOrientationMarkType NOTCH;
OrientationMarkLocation DOWN;
DiePitch 7.7158120000e+003 6.8148590000e+003;
DieOrigin 0.000000 0.000000;
WaferID “22”;
Slot 22;
SampleCenterLocation 7.3034360000e+003 1.6054760000e+003;
ClassLookup 256
0 “No_Review”
1 “False”
2 “Unknown”
3 “Bump”
4 “Buried_P/D”
5 “Scratch”
6 “CMP_SC”
7 “Surface_P/D”
8 “Tiny_P/D”
9 “Satellite”
10 “Discolor”
11 “Residue”
12 “Bridge”
13 “Roughness”
14 “Prelayer_def”
15 “Si_Residue”
16 “Circle”
17 “Dislocation”
18 “Pt residue”
19 “cone_defect”
20 “Salicide_abn”
21 “Swing”
22 “Grain”
23 “Ball_defect”
24 “Yellow spot”
25 “Prelayer_Sc”
26 “Water_Mark”
27 “27”
28 “Poly_Residue”
29 “Concave”
30 “COP”
31 “31”
32 “Si_hole”
33 “Seam”
34 “34”
35 “Over_Polish”
36 “roll”
37 “SN_Residue”
38 “38”
39 “Smear”
40 “Bubble”
41 “41”
42 “42”
43 “Si Damage”
44 “OX_Loss”
45 “Slurry_Ru”
46 “scum”
47 “ring residue”
48 “Hump”
49 “BTA residue”
50 “Repeating”
51 “Line_shaped”
52 “Defocus”
53 “hillock”
54 “PR/PM_Remain”
55 “Pat_collapse”
56 “punch throu”
57 “whisker”
58 “Galvanic”
59 “59”
60 “Arcing”
61 “Line_open”
62 “Corrosion”
63 “63”
64 “64”
65 “Slice_P/D”
66 “66”
67 “Bridge_FM”
68 “Met_Residue”
69 “Pits”
70 “70”
71 “Metal_Grain”
72 “Metal_Void”
73 “73”
74 “Pat_Fail”
75 “Immersion”
76 “Partial_Etch”
77 “Volcano”
78 “W recess”
79 “79”
80 “80”
81 “81”
82 “W_residue”
83 “Cu diffuse”
84 “Metal_Damage”
85 “Cu loss”
86 “Blind”
87 “TiN_Particle”
88 “Peeling”
89 “wave”
90 “Grape Defect”
91 “Other1”
92 “Other2”
93 “Other3”
94 “Other4”
95 “Other5”
96 “Crater”
97 “Dimple”
98 “98”
99 “Crack”
100 “100”
101 “Dark_VC”
102 “Bright_VC”
103 “Gray_VC”
104 “104”
105 “105”
106 “106”
107 “void”
108 “108”
109 “109”
110 “Protrusion”
111 “111”
112 “Plug_Peeling”
113 “M*_peeling”
114 “oil ball”
115 “115”
116 “pre patfail”
117 “large defect”
118 “118”
119 “119”
120 “W missing”
121 “121”
122 “Condense”
123 “123”
124 “edge peeling”
125 “necking”
126 “Metal_Bridge”
127 “127”
128 “128”
129 “129”
130 “shrink”
131 “131”
132 “132”
133 “133”
134 “134”
135 “135”
136 “136”
137 “137”
138 “138”
139 “SC Pattern”
140 “140”
141 “141”
142 “142”
143 “143”
144 “144”
145 “145”
146 “146”
147 “147”
148 “148”
149 “149”
150 “150”
151 “151”
152 “152”
153 “153”
154 “154”
155 “155”
156 “156”
157 “157”
158 “158”
159 “159”
160 “160”
161 “161”
162 “162”
163 “163”
164 “164”
165 “165”
166 “166”
167 “167”
168 “168”
169 “169”
170 “170”
171 “171”
172 “172”
173 “173”
174 “174”
175 “175”
176 “176”
177 “177”
178 “178”
179 “179”
180 “180”
181 “181”
182 “182”
183 “183”
184 “184”
185 “185”
186 “186”
187 “187”
188 “188”
189 “189”
190 “190”
191 “191”
192 “192”
193 “193”
194 “194”
195 “195”
196 “196”
197 “197”
198 “198”
199 “199”
200 “200”
201 “201”
202 “202”
203 “203”
204 “204”
205 “205”
206 “206”
207 “207”
208 “208”
209 “209”
210 “210”
211 “211”
212 “212”
213 “213”
214 “214”
215 “215”
216 “216”
217 “217”
218 “218”
219 “219”
220 “220”
221 “221”
222 “222”
223 “223”
224 “224”
225 “225”
226 “226”
227 “227”
228 “228”
229 “229”
230 “230”
231 “231”
232 “232”
233 “233”
234 “234”
235 “235”
236 “236”
237 “237”
238 “238”
239 “239”
240 “240”
241 “241”
242 “242”
243 “243”
244 “244”
245 “245”
246 “246”
247 “247”
248 “248”
249 “249”
250 “250”
251 “251”
252 “252”
253 “253”
254 “254”
255 “255”;
InspectionTest 1;
SampleTestPlan 509
-3 -13
-2 -13
-1 -13
0 -13
1 -13
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3 -13
4 -13
-5 -12
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0 -12
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-6 -11
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0 -8
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-8 -7
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0 -7
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-10 -6
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0 -6
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11 -6
-10 -5
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-11 -4
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0 -4
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12 -4
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0 -3
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6 -3
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9 -3
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12 -3
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0 -2
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2 -2
3 -2
4 -2
5 -2
6 -2
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8 -2
9 -2
10 -2
11 -2
12 -2
-11 -1
-10 -1
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-1 -1
0 -1
1 -1
2 -1
3 -1
4 -1
5 -1
6 -1
7 -1
8 -1
9 -1
10 -1
11 -1
12 -1
-11 0
-10 0
-9 0
-8 0
-7 0
-6 0
-5 0
-4 0
-3 0
-2 0
-1 0
0 0
1 0
2 0
3 0
4 0
5 0
6 0
7 0
8 0
9 0
10 0
11 0
12 0
-11 1
-10 1
-9 1
-8 1
-7 1
-6 1
-5 1
-4 1
-3 1
-2 1
-1 1
0 1
1 1
2 1
3 1
4 1
5 1
6 1
7 1
8 1
9 1
10 1
11 1
12 1
-11 2
-10 2
-9 2
-8 2
-7 2
-6 2
-5 2
-4 2
-3 2
-2 2
-1 2
0 2
1 2
2 2
3 2
4 2
5 2
6 2
7 2
8 2
9 2
10 2
11 2
12 2
-11 3
-10 3
-9 3
-8 3
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-6 3
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-1 3
0 3
1 3
2 3
3 3
4 3
5 3
6 3
7 3
8 3
9 3
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11 3
12 3
-10 4
-9 4
-8 4
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-1 4
0 4
1 4
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3 4
4 4
5 4
6 4
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8 4
9 4
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11 4
-10 5
-9 5
-8 5
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-1 5
0 5
1 5
2 5
3 5
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5 5
6 5
7 5
8 5
9 5
10 5
11 5
-10 6
-9 6
-8 6
-7 6
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-1 6
0 6
1 6
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3 6
4 6
5 6
6 6
7 6
8 6
9 6
10 6
11 6
-9 7
-8 7
-7 7
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0 7
1 7
2 7
3 7
4 7
5 7
6 7
7 7
8 7
9 7
-8 8
-7 8
-6 8
-5 8
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0 8
1 8
2 8
3 8
4 8
5 8
6 8
7 8
8 8
9 8
-8 9
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0 9
1 9
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4 9
5 9
6 9
7 9
8 9
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-7 10
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0 10
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-5 11
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-4 12
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0 12
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4 12
5 12
-2 13
-1 13
0 13
1 13
2 13
3 13;
AreaPerTest 2.3842900000e+010;
DefectRecordSpec 13 DEFECTID XREL YREL XINDEX YINDEX XSIZE YSIZE DEFECTAREA DSIZE CLASSNUMBER TEST IMAGECOUNT IMAGELIST ;
DefectList
1 7.1355600000e+003 4.4151580000e+003 2 13 1.750000 1.499000 0.822541 1.7500000000e+000 4 1 1 1
1 0
2 3.2871510000e+003 1.0529250000e+003 1 13 0.500000 0.249000 0.044117 5.0000000000e-001 91 1 1 1
2 0
3 4.5875360000e+003 6.2514110000e+003 1 12 1.250000 0.999000 0.366908 1.2500000000e+000 22 1 4 4
3 0
4 0
5 0
6 0
4 4.2242830000e+003 5.2669110000e+003 4 12 0.250000 0.499000 0.061519 4.9900000000e-001 8 1 4 4
7 0
8 0
9 0
10 0
5 1.8625190000e+003 1.8828980000e+003 -2 12 0.250000 0.249000 0.044117 2.5000000000e-001 91 1 1 1
11 0
6 3.9129090000e+003 2.9102200000e+002 5 12 1.000000 1.499000 0.340193 1.4990000000e+000 4 1 1 1
12 0
7 4.6875400000e+003 6.0795100000e+003 5 11 0.750000 0.499000 0.115930 7.5000000000e-001 91 1 1 1
13 0
8 4.3570390000e+003 6.4873810000e+003 -3 11 0.250000 0.249000 0.050245 2.5000000000e-001 91 1 1 1
14 0
9 4.6212900000e+002 5.0141470000e+003 0 11 0.500000 0.499000 0.140930 5.0000000000e-001 91 1 1 1
15 0
10 4.3621590000e+003 5.0081470000e+003 2 11 1.500000 1.999000 1.118372 1.9990000000e+000 22 1 1 1
16 0
11 4.6240360000e+003 3.0766480000e+003 5 11 0.250000 0.249000 0.054901 2.5000000000e-001 91 1 1 1
17 0
12 2.7251490000e+003 2.2392610000e+003 2 11 0.500000 0.499000 0.065686 5.0000000000e-001 91 1 1 1
18 0
13 5.5872990000e+003 5.5213500000e+002 -3 11 0.750000 0.499000 0.117646 7.5000000000e-001 8 1 4 4
19 0
20 0
21 0
22 0
14 7.3688400000e+002 5.5509980000e+003 6 10 1.000000 0.999000 0.181371 1.0000000000e+000 4 1 1 1
23 0
15 5.9123010000e+003 4.7144970000e+003 8 10 0.250000 0.249000 0.067156 2.5000000000e-001 8 1 4 4
24 0
25 0
26 0
27 0
16 3.4499070000e+003 1.7958740000e+003 -3 10 0.500000 0.499000 0.089215 5.0000000000e-001 91 1 1 1
28 0
17 1.8877640000e+003 1.6893850000e+003 7 10 0.750000 0.749000 0.163724 7.5000000000e-001 91 1 1 1
29 0
18 4.7489130000e+003 4.8403730000e+003 -7 9 0.500000 0.499000 0.090685 5.0000000000e-001 91 1 1 1
30 0
19 6.6811780000e+003 5.0253720000e+003 2 9 1.000000 0.999000 0.254409 1.0000000000e+000 4 1 1 1
31 0
20 4.1116570000e+003 2.1289980000e+003 3 9 1.000000 1.249000 0.261762 1.2490000000e+000 4 1 18 18
32 0
33 0
34 0
35 0
36 0
37 0
38 0
39 0
40 0
41 0
42 0
43 0
44 0
45 0
46 0
47 0
48 0
49 0
21 2.8000260000e+003 1.5949840000e+003 -1 9 0.250000 0.249000 0.050245 2.5000000000e-001 91 1 1 1
50 0
22 4.5381620000e+003 2.0700100000e+002 0 9 0.500000 0.749000 0.137744 7.4900000000e-001 8 1 4 4
51 0
52 0
53 0
54 0
23 6.4845560000e+003 6.1564710000e+003 0 8 2.250000 1.749000 0.942638 2.2500000000e+000 4 1 6 6
55 0
56 0
57 0
58 0
59 0
60 0
24 1.0811360000e+003 6.4322190000e+003 9 8 1.000000 1.249000 0.319360 1.2490000000e+000 4 1 1 1
61 0
25 6.8965560000e+003 5.8212350000e+003 -4 8 1.250000 0.999000 0.218871 1.2500000000e+000 4 1 1 1
62 0
26 4.4867870000e+003 3.9906100000e+003 -6 8 0.750000 2.499000 0.630141 2.4990000000e+000 4 1 1 1
63 0
27 4.2371630000e+003 3.4792210000e+003 -6 8 1.500000 1.499000 0.733081 1.5000000000e+000 4 1 1 1
64 0
28 5.4750430000e+003 2.9452360000e+003 3 8 0.750000 0.499000 0.117156 7.5000000000e-001 91 1 1 1
65 0
29 5.2751720000e+003 1.7147200000e+003 -2 8 0.500000 0.499000 0.109068 5.0000000000e-001 91 1 1 1
66 0
30 7.2293070000e+003 1.5365000000e+001 6 8 12.250000 9.499000 13.154289 1.2250000000e+001 22 1 1 1
67 0
31 2.8742720000e+003 6.4953500000e+003 5 7 0.750000 0.999000 0.146077 9.9900000000e-001 22 1 4 4
68 0
69 0
70 0
71 0
32 2.7741460000e+003 5.4279760000e+003 5 7 0.500000 0.749000 0.103676 7.4900000000e-001 91 1 1 1
72 0
33 4.8495420000e+003 4.7419630000e+003 6 7 1.250000 0.749000 0.200488 1.2500000000e+000 22 1 4 4
73 0
74 0
75 0
76 0
34 7.2081860000e+003 3.0397200000e+002 -2 7 1.250000 1.749000 0.360781 1.7490000000e+000 4 1 1 1
77 0
35 6.9484340000e+003 6.2850690000e+003 3 6 1.000000 0.999000 0.266419 1.0000000000e+000 4 1 1 1
78 0
36 6.6896810000e+003 5.5378170000e+003 9 6 0.500000 0.499000 0.118871 5.0000000000e-001 8 1 4 4
79 0
80 0
81 0
82 0
37 2.8867740000e+003 4.6838360000e+003 -2 6 0.750000 0.999000 0.169361 9.9900000000e-001 22 1 4 4
83 0
84 0
85 0
86 0
38 4.9999180000e+003 4.5016940000e+003 2 6 0.500000 0.499000 0.092156 5.0000000000e-001 91 1 1 1
87 0
39 6.6718030000e+003 3.1188340000e+003 3 6 0.750000 0.749000 0.140930 7.5000000000e-001 8 1 4 4
88 0
89 0
90 0
91 0
40 1.7126380000e+003 2.9952100000e+003 6 6 1.000000 0.999000 0.253674 1.0000000000e+000 4 1 1 1
92 0
41 1.7367680000e+003 1.6166950000e+003 0 6 0.750000 0.999000 0.173038 9.9900000000e-001 4 1 1 1
93 0
42 1.0723840000e+003 1.1214000000e+001 -6 6 3.000000 1.249000 1.888708 3.0000000000e+000 4 1 20 20
94 0
95 0
96 0
97 0
98 0
99 0
100 0
101 0
102 0
103 0
104 0
105 0
106 0
107 0
108 0
109 0
110 0
111 0
112 0
113 0
43 6.9428060000e+003 5.6198240000e+003 -7 5 0.750000 0.749000 0.182841 7.5000000000e-001 91 1 1 1
114 0
44 2.8216470000e+003 5.9524450000e+003 1 5 1.000000 0.499000 0.987491 1.0000000000e+000 4 1 1 1
115 0
45 2.8243970000e+003 5.9523200000e+003 1 5 1.500000 1.749000 0.970089 1.7490000000e+000 4 1 1 1
116 0
46 4.4249100000e+003 4.0453210000e+003 11 5 1.000000 0.749000 0.245341 1.0000000000e+000 4 1 1 1
117 0
47 2.1362660000e+003 2.0525730000e+003 6 5 0.250000 0.499000 0.067401 4.9900000000e-001 91 1 1 1
118 0
48 3.6866570000e+003 1.6670570000e+003 2 5 0.500000 0.499000 0.061764 5.0000000000e-001 8 1 4 4
119 0
120 0
121 0
122 0
49 5.8130000000e+001 3.3456100000e+002 -2 5 1.000000 0.999000 0.229165 1.0000000000e+000 4 1 1 1
123 0
50 1.2211380000e+003 3.2556100000e+002 -5 5 1.000000 0.999000 0.312742 1.0000000000e+000 4 1 1 1
124 0
51 1.8765150000e+003 2.4826000000e+001 0 5 1.250000 1.249000 0.429163 1.2500000000e+000 4 1 1 1
125 0
52 3.4000300000e+003 5.3024200000e+003 9 4 0.250000 0.249000 0.051470 2.5000000000e-001 91 1 1 1
126 0
53 5.4490430000e+003 4.7423110000e+003 8 4 1.250000 0.999000 0.389212 1.2500000000e+000 4 1 1 1
127 0
54 3.5737790000e+003 2.8453110000e+003 -6 4 0.250000 0.249000 0.043627 2.5000000000e-001 91 1 1 1
128 0
55 3.9995360000e+003 2.2467980000e+003 -7 4 0.750000 0.499000 0.102205 7.5000000000e-001 91 1 1 1
129 0
56 4.7117880000e+003 8.0256300000e+002 0 4 1.250000 1.499000 0.678425 1.4990000000e+000 4 1 1 1
130 0
57 5.7741760000e+003 3.6492300000e+002 -10 4 1.000000 1.249000 0.353428 1.2490000000e+000 22 1 4 4
131 0
132 0
133 0
134 0
58 7.2308070000e+003 1.5439000000e+001 10 4 9.250000 9.749000 9.386677 9.7490000000e+000 22 1 1 1
135 0
59 3.8219060000e+003 6.4916700000e+003 -10 3 0.500000 0.749000 0.109558 7.4900000000e-001 91 1 1 1
136 0
60 6.9999000000e+001 6.4400450000e+003 3 3 0.750000 0.999000 0.156371 9.9900000000e-001 22 1 4 4
137 0
138 0
139 0
140 0
61 7.0363090000e+003 4.6020340000e+003 12 3 0.250000 9.249000 1.517633 9.2490000000e+000 22 1 1 1
141 0
62 6.6056770000e+003 4.2532990000e+003 7 3 1.000000 0.999000 0.423280 1.0000000000e+000 4 1 1 1
142 0
63 6.6973060000e+003 4.5932270000e+003 0 3 2.000000 2.249000 1.900718 2.2490000000e+000 7 1 1 1
143 0
64 6.6804310000e+003 3.8406580000e+003 5 3 2.000000 1.749000 0.849502 2.0000000000e+000 7 1 1 1
144 0
65 6.7818040000e+003 3.5819210000e+003 4 3 0.750000 0.749000 0.197302 7.5000000000e-001 8 1 4 4
145 0
146 0
147 0
148 0
66 4.7497910000e+003 1.7897850000e+003 10 3 0.750000 0.749000 0.142156 7.5000000000e-001 91 1 1 1
149 0
67 3.9870350000e+003 4.6665210000e+003 10 2 1.250000 2.999000 0.978177 2.9990000000e+000 4 1 1 1
150 0
68 2.2870180000e+003 4.4452840000e+003 -1 2 1.250000 0.749000 0.191665 1.2500000000e+000 4 1 1 1
151 0
69 8.2475700000e+002 3.5961580000e+003 -3 2 0.250000 0.499000 0.062254 4.9900000000e-001 91 1 1 1
152 0
70 4.2491590000e+003 2.5025350000e+003 1 2 0.500000 0.499000 0.077205 5.0000000000e-001 91 1 1 1
153 0
71 1.9126400000e+003 2.4172860000e+003 1 2 1.000000 0.499000 0.134067 1.0000000000e+000 22 1 4 4
154 0
155 0
156 0
157 0
72 2.0502660000e+003 1.6842840000e+003 -4 2 0.250000 0.499000 0.065931 4.9900000000e-001 22 1 4 4
158 0
159 0
160 0
161 0
73 2.2702680000e+003 3.3028800000e+002 -4 2 0.750000 0.499000 0.109313 7.5000000000e-001 0 1 0 0
74 4.1770370000e+003 2.1777200000e+002 1 2 0.250000 0.499000 0.073529 4.9900000000e-001 91 1 1 1
162 0
75 5.7620490000e+003 5.8395060000e+003 2 1 1.250000 0.749000 0.216665 1.2500000000e+000 22 1 4 4
163 0
164 0
165 0
166 0
76 4.4125400000e+003 5.7397570000e+003 -3 1 1.250000 1.249000 0.340193 1.2500000000e+000 4 1 1 1
167 0
77 1.9001440000e+003 5.7406320000e+003 -8 1 0.500000 0.499000 0.089705 5.0000000000e-001 91 1 1 1
168 0
78 4.7000410000e+003 3.8963820000e+003 -5 1 0.250000 0.499000 0.065686 4.9900000000e-001 91 1 1 1
169 0
79 4.9491640000e+003 3.2397740000e+003 2 1 1.000000 0.999000 0.270341 1.0000000000e+000 22 1 4 4
170 0
171 0
172 0
173 0
80 1.0001320000e+003 3.6087710000e+003 3 1 0.500000 0.499000 0.072793 5.0000000000e-001 91 1 1 1
174 0
81 4.9499140000e+003 2.5930220000e+003 10 1 1.000000 0.749000 0.221321 1.0000000000e+000 4 1 1 1
175 0
82 5.8490510000e+003 1.7673850000e+003 -1 1 0.250000 0.499000 0.046078 4.9900000000e-001 22 1 4 4
176 0
177 0
178 0
179 0
83 1.6252650000e+003 2.1285070000e+003 12 1 0.750000 0.749000 0.145832 7.5000000000e-001 91 1 1 1
180 0
84 6.9429300000e+003 1.3610250000e+003 10 1 1.000000 0.749000 0.197302 1.0000000000e+000 4 1 1 1
181 0
85 8.8776000000e+002 1.1592570000e+003 11 1 0.750000 0.999000 0.231125 9.9900000000e-001 91 1 1 1
182 0
86 1.5252660000e+003 5.6592460000e+003 -8 0 0.250000 0.499000 0.068872 4.9900000000e-001 22 1 4 4
183 0
184 0
185 0
186 0
87 6.2880000000e+001 5.5984960000e+003 -9 0 0.500000 0.999000 0.140685 9.9900000000e-001 22 1 4 4
187 0
188 0
189 0
190 0
88 4.5490370000e+003 5.3792590000e+003 -9 0 0.250000 0.249000 0.043382 2.5000000000e-001 91 1 1 1
191 0
89 6.9393100000e+003 2.1156190000e+003 -9 0 0.750000 0.999000 0.263968 9.9900000000e-001 4 1 1 1
192 0
90 7.1550580000e+003 5.8451200000e+002 -10 0 2.250000 2.499000 1.784297 2.4990000000e+000 4 1 20 20
193 0
194 0
195 0
196 0
197 0
198 0
199 0
200 0
201 0
202 0
203 0
204 0
205 0
206 0
207 0
208 0
209 0
210 0
211 0
212 0
91 4.5695390000e+003 1.6024800000e+002 12 0 0.250000 0.249000 0.033088 2.5000000000e-001 91 1 1 1
213 0
92 9.2450700000e+002 6.0546250000e+003 11 -1 0.750000 0.999000 0.184067 9.9900000000e-001 22 1 4 4
214 0
215 0
216 0
217 0
93 6.8688300000e+002 6.0031060000e+003 5 -1 0.500000 0.499000 0.092646 5.0000000000e-001 91 1 1 1
218 0
94 5.3751710000e+003 5.9436060000e+003 2 -1 0.500000 0.499000 0.086274 5.0000000000e-001 91 1 1 1
219 0
95 2.6617740000e+003 4.9042320000e+003 7 -1 0.250000 0.499000 0.082107 4.9900000000e-001 91 1 1 1
220 0
96 2.4742690000e+003 4.3351240000e+003 10 -1 0.250000 0.499000 0.065931 4.9900000000e-001 91 1 1 1
221 0
97 7.6275900000e+002 3.9928570000e+003 2 -1 0.750000 0.999000 0.201714 9.9900000000e-001 22 1 4 4
222 0
223 0
224 0
225 0
98 2.0866410000e+003 3.3292500000e+003 8 -1 0.500000 0.749000 0.108332 7.4900000000e-001 8 1 4 4
226 0
227 0
228 0
229 0
99 2.1126440000e+003 3.1033570000e+003 9 -1 1.000000 1.249000 0.443133 1.2490000000e+000 4 1 1 1
230 0
100 5.3997960000e+003 2.7306110000e+003 9 -1 0.750000 0.749000 0.169116 7.5000000000e-001 91 1 1 1
231 0
101 3.0741530000e+003 9.0973600000e+002 -8 -1 0.500000 0.499000 0.058088 5.0000000000e-001 91 1 1 1
232 0
102 4.0542860000e+003 2.3048500000e+002 1 -1 0.250000 0.249000 0.070588 2.5000000000e-001 91 1 1 1
233 0
103 5.3194170000e+003 6.4887330000e+003 3 -2 1.000000 0.999000 0.282841 1.0000000000e+000 4 1 1 1
234 0
104 6.4923050000e+003 3.7160980000e+003 4 -2 1.750000 1.749000 0.591171 1.7500000000e+000 4 1 1 1
235 0
105 3.8738100000e+002 1.8775980000e+003 11 -2 1.000000 0.749000 0.224263 1.0000000000e+000 4 1 1 1
236 0
106 5.1162800000e+002 1.2857390000e+003 6 -2 0.500000 0.499000 0.068382 5.0000000000e-001 91 1 1 1
237 0
107 2.5638980000e+003 1.4622300000e+002 6 -2 1.500000 1.249000 0.632837 1.5000000000e+000 74 1 4 4
238 0
239 0
240 0
241 0
108 4.3100370000e+003 1.0172400000e+002 5 -2 0.750000 0.249000 0.098283 7.5000000000e-001 91 1 1 1
242 0
109 5.5696730000e+003 1.5484800000e+002 -1 -2 2.000000 1.499000 0.684798 2.0000000000e+000 7 1 1 1
243 0
110 3.9884070000e+003 6.4972200000e+003 -10 -3 1.500000 1.499000 0.648033 1.5000000000e+000 4 1 1 1
244 0
111 6.6084290000e+003 6.3533470000e+003 -9 -3 1.500000 2.249000 0.711268 2.2490000000e+000 7 1 7 7
245 0
246 0
247 0
248 0
249 0
250 0
251 0
112 3.4494030000e+003 5.0913500000e+003 -11 -3 0.500000 0.499000 0.086764 5.0000000000e-001 91 1 1 1
252 0
113 1.3628890000e+003 4.9085820000e+003 8 -3 0.500000 0.249000 0.061029 5.0000000000e-001 91 1 1 1
253 0
114 2.8370220000e+003 3.5350980000e+003 10 -3 0.750000 0.999000 0.217890 9.9900000000e-001 22 1 4 4
254 0
255 0
256 0
257 0
115 7.0460560000e+003 2.5900980000e+003 3 -3 3.250000 2.999000 1.606113 3.2500000000e+000 4 1 1 1
258 0
116 3.5040310000e+003 1.7960860000e+003 12 -3 0.250000 0.249000 0.009559 2.5000000000e-001 91 1 1 1
259 0
117 1.6493910000e+003 2.2050820000e+003 2 -3 0.500000 0.749000 0.108332 7.4900000000e-001 8 1 4 4
260 0
261 0
262 0
263 0
118 1.4748860000e+003 1.5472240000e+003 1 -3 1.500000 1.249000 0.600485 1.5000000000e+000 22 1 4 4
264 0
265 0
266 0
267 0
119 7.1655620000e+003 9.1046100000e+002 0 -3 0.750000 0.499000 0.156616 7.5000000000e-001 8 1 4 4
268 0
269 0
270 0
271 0
120 3.1112770000e+003 1.3212000000e+001 5 -3 0.750000 0.749000 0.207596 7.5000000000e-001 91 1 1 1
272 0
121 1.0807590000e+003 6.4339590000e+003 -2 -4 1.750000 1.749000 0.832100 1.7500000000e+000 22 1 1 1
273 0
122 1.5882660000e+003 5.9970680000e+003 8 -4 0.250000 0.249000 0.042892 2.5000000000e-001 91 1 1 1
274 0
123 6.6686800000e+003 5.0674530000e+003 10 -4 1.250000 1.499000 0.291419 1.4990000000e+000 74 1 9 9
275 0
276 0
277 0
278 0
279 0
280 0
281 0
282 0
283 0
124 6.6510570000e+003 3.7121980000e+003 7 -4 1.250000 0.999000 0.270586 1.2500000000e+000 22 1 4 4
284 0
285 0
286 0
287 0
125 4.3675400000e+002 3.3279620000e+003 -3 -4 0.250000 0.499000 0.057352 4.9900000000e-001 91 1 1 1
288 0
126 6.8194290000e+003 6.5446100000e+002 2 -4 2.000000 2.249000 0.962246 2.2490000000e+000 7 1 1 1
289 0
127 1.5868910000e+003 5.9719310000e+003 4 -5 1.000000 0.999000 0.274997 1.0000000000e+000 22 1 4 4
290 0
291 0
292 0
293 0
128 4.3750380000e+003 5.8434320000e+003 2 -5 0.250000 0.499000 0.062254 4.9900000000e-001 91 1 1 1
294 0
129 3.4116560000e+003 5.9925560000e+003 -10 -5 0.500000 1.249000 0.161028 1.2490000000e+000 22 1 6 6
295 0
296 0
297 0
298 0
299 0
300 0
130 3.1200300000e+002 4.5400720000e+003 -3 -5 0.750000 0.499000 0.110538 7.5000000000e-001 8 1 6 6
301 0
302 0
303 0
304 0
305 0
306 0
131 6.6610570000e+003 3.8515590000e+003 -8 -5 1.250000 1.249000 0.382594 1.2500000000e+000 4 1 1 1
307 0
132 8.0050600000e+002 3.2218260000e+003 -1 -5 0.250000 0.249000 0.042892 2.5000000000e-001 91 1 1 1
308 0
133 6.1481740000e+003 3.4291990000e+003 4 -5 1.000000 0.999000 0.328183 1.0000000000e+000 4 1 1 1
309 0
134 6.1604230000e+003 3.2880750000e+003 5 -5 1.000000 0.249000 0.123773 1.0000000000e+000 22 1 4 4
310 0
311 0
312 0
313 0
135 7.1175800000e+002 2.7528100000e+003 3 -5 0.250000 0.249000 0.053431 2.5000000000e-001 91 1 1 1
314 0
136 4.3775300000e+002 2.2432010000e+003 7 -5 0.750000 0.749000 0.163724 7.5000000000e-001 8 1 4 4
315 0
316 0
317 0
318 0
137 3.8867860000e+003 1.2344320000e+003 -2 -5 0.250000 0.249000 0.048529 2.5000000000e-001 91 1 1 1
319 0
138 1.5773870000e+003 4.1545100000e+002 1 -5 3.000000 4.499000 4.916376 4.4990000000e+000 4 1 7 7
320 0
321 0
322 0
323 0
324 0
325 0
326 0
139 1.1251370000e+003 5.6804210000e+003 10 -6 0.500000 0.249000 0.057843 5.0000000000e-001 91 1 1 1
327 0
140 6.6423070000e+003 5.7210460000e+003 -1 -6 1.250000 0.499000 0.209557 1.2500000000e+000 4 1 1 1
328 0
141 6.5000800000e+002 4.0559190000e+003 8 -6 0.750000 0.499000 0.119607 7.5000000000e-001 91 1 1 1
329 0
142 6.8758100000e+003 3.1099200000e+003 -2 -6 1.250000 1.249000 0.279409 1.2500000000e+000 4 1 1 1
330 0
143 3.3375260000e+003 2.5559360000e+003 2 -6 0.750000 0.499000 0.084068 7.5000000000e-001 91 1 2 2
331 0
332 0
144 4.3620380000e+003 1.9540470000e+003 1 -6 0.750000 0.749000 0.227204 7.5000000000e-001 8 1 6 6
333 0
334 0
335 0
336 0
337 0
338 0
145 4.8710430000e+003 9.0424000000e+001 -8 -6 2.750000 3.499000 2.812229 3.4990000000e+000 7 1 1 1
339 0
146 6.6118040000e+003 1.2615640000e+003 -2 -6 1.250000 1.499000 0.422545 1.4990000000e+000 4 1 1 1
340 0
147 1.0873840000e+003 6.1530440000e+003 -4 -7 1.000000 0.499000 0.237253 1.0000000000e+000 4 1 1 1
341 0
148 1.4755150000e+003 5.5905300000e+003 8 -7 0.250000 0.499000 0.056372 4.9900000000e-001 91 1 1 1
342 0
149 3.1877790000e+003 5.8216520000e+003 1 -7 0.250000 0.249000 0.042402 2.5000000000e-001 91 1 1 1
343 0
150 4.3641630000e+003 3.8007790000e+003 10 -7 1.500000 1.499000 0.728670 1.5000000000e+000 4 1 1 1
344 0
151 4.5991660000e+003 3.0722770000e+003 -5 -7 0.500000 0.749000 0.110048 7.4900000000e-001 91 1 1 1
345 0
152 4.2742830000e+003 2.3595450000e+003 10 -7 0.250000 0.249000 0.043627 2.5000000000e-001 91 1 1 1
346 0
153 6.6359320000e+003 2.0515280000e+003 8 -7 0.500000 0.249000 0.065686 5.0000000000e-001 91 1 1 1
347 0
154 2.7126510000e+003 1.9957790000e+003 -2 -7 1.500000 0.749000 0.451957 1.5000000000e+000 4 1 1 1
348 0
155 4.5245350000e+003 6.4231540000e+003 5 -8 0.250000 0.499000 0.051715 4.9900000000e-001 91 1 1 1
349 0
156 3.1877750000e+003 6.4916530000e+003 7 -8 0.750000 0.999000 0.187498 9.9900000000e-001 4 1 1 1
350 0
157 3.5621530000e+003 3.1977830000e+003 -5 -8 0.500000 0.749000 0.114950 7.4900000000e-001 91 1 1 1
351 0
158 5.9436720000e+003 3.5010300000e+003 10 -8 0.500000 0.749000 0.112989 7.4900000000e-001 91 1 1 1
352 0
159 5.5744200000e+003 2.2854080000e+003 -2 -8 0.500000 0.749000 0.111764 7.4900000000e-001 91 1 1 1
353 0
160 6.8730550000e+003 1.3446580000e+003 -1 -8 1.750000 1.499000 0.492397 1.7500000000e+000 4 1 1 1
354 0
161 2.9597760000e+003 2.3895000000e+001 2 -8 0.750000 0.249000 0.088970 7.5000000000e-001 91 1 1 1
355 0
162 2.2257670000e+003 5.0721580000e+003 1 -8 0.250000 0.249000 0.043872 2.5000000000e-001 91 1 1 1
356 0
163 3.5495290000e+003 5.2936480000e+003 -4 -9 0.750000 0.749000 0.152204 7.5000000000e-001 91 1 2 2
357 0
358 0
164 1.0621360000e+003 3.7846340000e+003 6 -9 0.500000 1.249000 0.200488 1.2490000000e+000 4 1 1 1
359 0
165 1.6188000000e+002 3.7223850000e+003 0 -9 0.500000 0.749000 0.116175 7.4900000000e-001 91 1 1 1
360 0
166 5.5050300000e+002 3.4810230000e+003 5 -9 0.250000 0.499000 0.068627 4.9900000000e-001 8 1 6 6
361 0
362 0
363 0
364 0
365 0
366 0
167 1.7872630000e+003 2.5727730000e+003 5 -9 0.750000 0.749000 0.131371 7.5000000000e-001 8 1 4 4
367 0
368 0
369 0
370 0
168 2.7747770000e+003 1.8918850000e+003 -2 -9 0.250000 0.249000 0.050000 2.5000000000e-001 91 1 1 1
371 0
169 3.1245270000e+003 1.2051330000e+003 5 -9 0.250000 0.499000 0.061029 4.9900000000e-001 91 1 1 1
372 0
170 5.6629230000e+003 5.7972450000e+003 2 -10 0.500000 1.249000 0.191665 1.2490000000e+000 22 1 4 4
373 0
374 0
375 0
376 0
171 3.5050700000e+002 4.9599940000e+003 -2 -10 0.750000 1.249000 0.316174 1.2490000000e+000 22 1 4 4
377 0
378 0
379 0
380 0
172 6.7620550000e+003 3.4233860000e+003 -7 -10 0.750000 0.749000 0.241419 7.5000000000e-001 91 1 1 1
381 0
173 6.7836820000e+003 3.0774950000e+003 3 -10 1.500000 0.749000 0.518623 1.5000000000e+000 4 1 1 1
382 0
174 6.4450530000e+003 2.3396380000e+003 -2 -10 0.750000 0.999000 0.158087 9.9900000000e-001 22 1 4 4
383 0
384 0
385 0
386 0
175 6.7750530000e+003 2.6383850000e+003 5 -10 2.250000 2.499000 1.440918 2.4990000000e+000 4 1 1 1
387 0
176 2.9880240000e+003 1.4540120000e+003 -7 -10 0.750000 0.499000 0.113479 7.5000000000e-001 22 1 4 4
388 0
389 0
390 0
391 0
177 3.0000280000e+003 1.0347470000e+003 -6 -10 0.750000 0.749000 0.224508 7.5000000000e-001 8 1 4 4
392 0
393 0
394 0
395 0
178 6.6880580000e+003 2.5487200000e+002 -1 -10 0.750000 0.249000 0.172057 7.5000000000e-001 0 1 0 0
179 3.0013100000e+002 5.5789850000e+003 -1 -11 1.000000 0.999000 0.248772 1.0000000000e+000 4 1 1 1
396 0
180 6.7828030000e+003 5.2228740000e+003 5 -11 1.750000 1.749000 0.782836 1.7500000000e+000 4 1 1 1
397 0
181 3.6380330000e+003 5.0103560000e+003 -1 -11 0.250000 0.249000 0.051225 2.5000000000e-001 91 1 1 1
398 0
182 1.5880130000e+003 4.3669980000e+003 -4 -11 0.750000 0.499000 0.112009 7.5000000000e-001 91 1 1 1
399 0
183 3.3372800000e+003 3.9353580000e+003 4 -11 0.750000 0.499000 0.111273 7.5000000000e-001 8 1 4 4
400 0
401 0
402 0
403 0
184 2.3800500000e+002 2.9669830000e+003 3 -11 0.250000 0.499000 0.067401 4.9900000000e-001 91 1 1 1
404 0
185 2.4875220000e+003 1.9923460000e+003 5 -12 0.250000 0.249000 0.049019 2.5000000000e-001 91 1 1 1
405 0
186 5.3874190000e+003 1.7193600000e+003 -2 -12 0.500000 0.749000 0.091421 7.4900000000e-001 8 1 4 4
406 0
407 0
408 0
409 0
187 5.8131720000e+003 1.5671110000e+003 -5 -12 0.500000 0.749000 0.144116 7.4900000000e-001 91 1 1 1
410 0
188 7.2238080000e+003 6.1757230000e+003 0 -13 1.250000 1.249000 0.408084 1.2500000000e+000 74 1 9 9
411 0
412 0
413 0
414 0
415 0
416 0
417 0
418 0
419 0
189 2.8877770000e+003 3.8568340000e+003 0 -13 0.750000 0.749000 0.126715 7.5000000000e-001 91 1 1 1
420 0
190 7.1408070000e+003 1.4512250000e+003 4 -13 0.750000 0.749000 0.202939 7.5000000000e-001 91 1 1 1
421 0
191 1.9115180000e+003 1.4587000000e+001 3 -13 0.750000 0.749000 0.212008 7.5000000000e-001 91 1 1 1
422 0;
SummarySpec 5 TESTNO NDEFECT DEFDENSITY NDIE NDEFDIE ;
SummaryList
1 191 0.801077 509 164;
EndOfFile;